Historical Documents

Substrate: Ceramic Chip Carrier

Contamination Challenge: A Laser-based manufacturing process produces particle-based contamination on and around an L-shaped circuit pattern which must be removed prior to the next step in the proprietary fabrication process.


Robotic CO2 Composite Spray™ cleaning process and system.

  • Benchtop Cartesian robot
  • Robot has an end-of-arm spray tool (EOAT ) comprising a single CO2 composite spray applicator
  • Cleaning cell with vertical push-pull ionized HEPA shower and exhaust system
  1. 100% dry processing – Dry-In/Dry-Out
  2. Selective cleaning (contaminated L-shaped surface portion)
  3. Fast processing – single pass
  4. Low operational cost
  5. Minimal labor input